reviewTop 1% cited
Recent aspects concerning DC reactive magnetron sputtering of thin films: a review
Surface and Coatings Technology · 2000 · Vol. 127(2-3) · pp. 203–218
I. Safi✉(Loughborough University)
Metal and Thin Film MechanicsSemiconductor materials and devicesDiamond and Carbon-based Materials ResearchMaterials scienceSputteringCavity magnetronCathodeElectric arcHigh-power impulse magnetron sputteringSputter depositionThin filmDeposition (geology)Plasma
Citations
519
FWCI
13.17
field-weighted impact
References
74
Percentile
99%
vs. same field & year
Citations per year
Cited by
Reactive magnetron sputtering of thin films: present status and trends
Thin Solid Films · 2004 · 392 citations
Fundamental understanding and modeling of reactive sputtering processes
Thin Solid Films · 2005 · 690 citations
Nanostructured nitride films of multi-element high-entropy alloys by reactive DC sputtering
Surface and Coatings Technology · 2004 · 560 citations
Control of reactive sputtering processes
Thin Solid Films · 2005 · 393 citations
References
Pulsed magnetron sputter technology
Surface and Coatings Technology · 1993 · 336 citations
Citation Network
How this paper connects to the literature. Drag to explore, click any node to open that paper.