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Nanostructured nitride films of multi-element high-entropy alloys by reactive DC sputtering

Surface and Coatings Technology · 2004 · Vol. 188-189 · pp. 193–200
Ta-Kun ChenTao-Tsung ShunJien‐Wei YehMing‐Show Wong
Metal and Thin Film MechanicsHigh Entropy Alloys StudiesIon-surface interactions and analysisMaterials scienceNitrideAlloySputteringAmorphous solidCrystallinityThin filmMetallurgyAnalytical Chemistry (journal)Composite material

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  • Industrial Technology Research Institute
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