Semiconductor materials and devices

This cluster of papers focuses on the advances in atomic layer deposition (ALD) technology, particularly in the context of high-k dielectrics, gate oxides, and semiconductor devices. It covers topics such as thin film growth, dielectric breakdown mechanisms, metal gate transistors, interface engineering, and the impact of negative bias temperature instability (NBTI) degradation on device performance.

Journals publishing in this area

1

Applied Physics Letters

ISSN 0003-695118,989 articles in this topic

556h-index

3.35Impact

140.7KArticles

6.1MCitations

2

Journal of Applied Physics

ISSN 0021-897917,047 articles in this topic

526h-index

2.41Impact

152.6KArticles

4.9MCitations

3

IEEE Transactions on Electron Devices

ISSN 0018-938313,063 articles in this topic

274h-index

2.68Impact

32.7KArticles

807.8KCitations

4

Japanese Journal of Applied Physics

ISSN 0021-492212,626 articles in this topic

236h-index

1.18Impact

88.5KArticles

1.2MCitations

5

Thin Solid Films

ISSN 0040-60908,449 articles in this topic

251h-index

2.20Impact

47.3KArticles

1.1MCitations

6

Journal of The Electrochemical Society

ISSN 0013-46516,381 articles in this topic

416h-index

3.12Impact

55.6KArticles

2.1MCitations

7

Applied Surface Science

ISSN 0169-43326,158 articles in this topic

272h-index

5.17Impact

68.1KArticles

2MCitations

8

Physical review. B, Condensed matter

ISSN 0163-18295,240 articles in this topic

596h-index

93.1KArticles

5.5MCitations

9

Journal of Crystal Growth

ISSN 0022-02484,698 articles in this topic

204h-index

1.98Impact

41.6KArticles

860KCitations

10

Surface Science

ISSN 0039-60284,506 articles in this topic

268h-index

1.87Impact

39.5KArticles

1.1MCitations

11

IEEE Transactions on Nuclear Science

ISSN 0018-94993,273 articles in this topic

181h-index

1.21Impact

32.9KArticles

475KCitations

12

Physical Review B

ISSN 1098-01212,920 articles in this topic

447h-index

70.3KArticles

3.2MCitations

13

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

ISSN 0168-583X2,900 articles in this topic

179h-index

1.49Impact

42.3KArticles

558KCitations

14

Electronics Letters

ISSN 0013-51942,833 articles in this topic

212h-index

0.97Impact

54.2KArticles

793.3KCitations

15

Surface and Coatings Technology

ISSN 0257-89722,804 articles in this topic

223h-index

5.86Impact

31.6KArticles

992.6KCitations

16

IEEE Journal of Solid-State Circuits

ISSN 0018-92002,513 articles in this topic

301h-index

2.71Impact

16.5KArticles

706.1KCitations

17

Journal of Physics D Applied Physics

ISSN 0022-37272,070 articles in this topic

271h-index

2.41Impact

35.7KArticles

948.7KCitations

18

physica status solidi (b)

ISSN 0370-19721,974 articles in this topic

177h-index

1.55Impact

38.5KArticles

484.6KCitations

19

Solid State Communications

ISSN 0038-10981,924 articles in this topic

228h-index

2.68Impact

44.6KArticles

813.8KCitations

20

Physica B Condensed Matter

ISSN 0921-45261,497 articles in this topic

155h-index

3.18Impact

40.6KArticles

476.4KCitations

21

Nanotechnology

ISSN 0957-44841,481 articles in this topic

248h-index

2.79Impact

25KArticles

813.6KCitations

22

Applied Physics A

Applied Physics A

ISSN 0947-83961,475 articles in this topic

198h-index

2.81Impact

24.8KArticles

496.7KCitations

23

Journal of Physics Condensed Matter

ISSN 0953-89841,390 articles in this topic

282h-index

2.05Impact

40.8KArticles

1MCitations

24

Journal of Non-Crystalline Solids

ISSN 0022-30931,273 articles in this topic

237h-index

2.90Impact

31.4KArticles

788.8KCitations

25

Chemistry of Materials

ISSN 0897-47561,088 articles in this topic

467h-index

5.32Impact

28.1KArticles

2.1MCitations

26

IEEE Transactions on Magnetics

IEEE Transactions on Magnetics

ISSN 0018-94641,080 articles in this topic

201h-index

0.99Impact

47.4KArticles

797.5KCitations

27

Journal of the American Ceramic Society

ISSN 0002-78201,052 articles in this topic

320h-index

3.07Impact

36.5KArticles

1.3MCitations

28

Journal of materials research/Pratt's guide to venture capital sources

ISSN 0884-1616940 articles in this topic

210h-index

2.18Impact

16.1KArticles

485.2KCitations

29

Nano Letters

ISSN 1530-6984936 articles in this topic

597h-index

7.30Impact

26.8KArticles

2.7MCitations

30

Journal of Materials Chemistry C

ISSN 2050-7526653 articles in this topic

226h-index

3.99Impact

24.4KArticles

676.3KCitations

31

Proceedings of the IEEE

ISSN 0018-9219600 articles in this topic

466h-index

8.46Impact

20.1KArticles

1.3MCitations

32

Corrosion Science

ISSN 0010-938X494 articles in this topic

288h-index

8.80Impact

17.3KArticles

883.5KCitations

33

Journal of the European Ceramic Society

ISSN 0955-2219493 articles in this topic

204h-index

5.04Impact

18KArticles

605.1KCitations

34

Physical review. B, Solid state

ISSN 0556-2805403 articles in this topic

303h-index

10.6KArticles

741.6KCitations

35

Nature Nanotechnology

ISSN 1748-3387132 articles in this topic

494h-index

22.90Impact

5.9KArticles

1MCitations

36

International Journal of Research in Circuits Devices and Systems

ISSN 2708-45316 articles in this topic

1h-index

0.07Impact

61Articles

4Citations

37

International Journal of Electronic Devices and Networking

ISSN 2708-44772 articles in this topic

1h-index

0.02Impact

63Articles

6Citations

38

International Journal of Electronics and Microcircuits

ISSN 2708-44931 articles in this topic

1h-index

0.11Impact

40Articles

4Citations

39

International Journal of Research in Advanced Electronics Engineering

ISSN 2708-45581 articles in this topic

1h-index

0.16Impact

48Articles

7Citations