articleTop 10% cited
Plastic properties of thin films on substrates as measured by submicron indentation hardness and substrate curvature techniques
Journal of materials research/Pratt's guide to venture capital sources · 1986 · Vol. 1(6) · pp. 845–851
M. Doerner✉(IBM (United States))Donald S. Gardner(Stanford University)William D. Nix(Stanford University)
Metal and Thin Film MechanicsCopper Interconnects and ReliabilitySemiconductor materials and devicesMaterials scienceSubstrate (aquarium)Composite materialSiliconIndentationCurvatureTungstenWaferThin filmAluminium
Citations
341
FWCI
10.41
field-weighted impact
References
19
Percentile
99%
vs. same field & year
Citations per year
Cited by
Separation of film thickness and grain boundary strengthening effects in Al thin films on Si
Journal of materials research/Pratt's guide to venture capital sources · 1992 · 346 citations
Influences of stress on the measurement of mechanical properties using nanoindentation: Part I. Experimental studies in an aluminum alloy
Journal of materials research/Pratt's guide to venture capital sources · 1996 · 589 citations
Analysis of elastic and plastic deformation associated with indentation testing of thin films on substrates
International Journal of Solids and Structures · 1988 · 536 citations
Substrate effects on nanoindentation mechanical property measurement of soft films on hard substrates
Journal of materials research/Pratt's guide to venture capital sources · 1999 · 368 citations
Determining the mechanical properties of small volumes of material from submicrometer spherical indentations
Journal of materials research/Pratt's guide to venture capital sources · 1995 · 369 citations
Determination of indenter tip geometry and indentation contact area for depth-sensing indentation experiments
Journal of materials research/Pratt's guide to venture capital sources · 1998 · 809 citations
Effects of the substrate on the determination of thin film mechanical properties by nanoindentation
Acta Materialia · 2002 · 1,534 citations
References
A method for interpreting the data from depth-sensing indentation instruments
Journal of materials research/Pratt's guide to venture capital sources · 1986 · 2,800 citations
Citation Network
How this paper connects to the literature. Drag to explore, click any node to open that paper.