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Substrate effects on nanoindentation mechanical property measurement of soft films on hard substrates

Ting Y. TsuiGeorge M. Pharr
Metal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchAdhesion, Friction, and Surface InteractionsNanoindentationMaterials scienceIndentationComposite materialSubstrate (aquarium)Elastic modulusPenetration depthThin filmAluminiumModulus
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368
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References
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Journal of materials research/Pratt's guide to venture capital sources · 1998 · 927 citations
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Journal of materials research/Pratt's guide to venture capital sources · 1996 · 481 citations
An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments
Journal of materials research/Pratt's guide to venture capital sources · 1992 · 26,236 citations
A method for interpreting the data from depth-sensing indentation instruments
Journal of materials research/Pratt's guide to venture capital sources · 1986 · 2,800 citations
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Substrate effects on nanoindentation mechanical property measurement of soft films on hard substrates · Scinovex