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Effects of the substrate on the determination of thin film mechanical properties by nanoindentation

Acta Materialia · 2002 · Vol. 50(1) · pp. 23–38
Ranjana SahaWilliam D. Nix
Metal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchForce Microscopy Techniques and ApplicationsNanoindentationMaterials scienceComposite materialSapphireIndentationThin filmElastic modulusStiffnessSubstrate (aquarium)Indentation hardness

Funding

  • U.S. Department of Energy
  • Basic Energy Sciences
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References
On the hardness of coated systems
Surface and Coatings Technology · 1998 · 586 citations
A new method for analyzing data from continuous depth-sensing microindentation tests
Journal of materials research/Pratt's guide to venture capital sources · 1990 · 413 citations
Substrate effects on nanoindentation mechanical property measurement of soft films on hard substrates
Journal of materials research/Pratt's guide to venture capital sources · 1999 · 368 citations
Elastic analysis of some punch problems for a layered medium
International Journal of Solids and Structures · 1987 · 870 citations
Elastic contact versus indentation modeling of multi-layered materials
International Journal of Solids and Structures · 1992 · 456 citations
Mechanism-based strain gradient plasticity— I. Theory
Journal of the Mechanics and Physics of Solids · 1999 · 2,177 citations
Mechanism-based strain gradient plasticity—II. Analysis
Journal of the Mechanics and Physics of Solids · 2000 · 648 citations
Influences of pileup on the measurement of mechanical properties by load and depth sensing indentation techniques
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