reviewTop 1% cited
High power pulsed magnetron sputtering: A review on scientific and engineering state of the art
Surface and Coatings Technology · 2009 · Vol. 204(11) · pp. 1661–1684
Kostas Sarakinos✉(RWTH Aachen University)Jones Alami(Sulzer (Germany))Stéphanos Konstantinidis(University of Mons)
Metal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchSemiconductor materials and devicesHigh-power impulse magnetron sputteringMaterials scienceSputter depositionPhysical vapor depositionOptoelectronicsDuty cycleCavity magnetronPlasmaSputteringIonization
Citations
1,032
FWCI
70.72
field-weighted impact
References
157
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Citations per year
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References
Low resistivity transparent conducting Al-doped ZnO films prepared by pulsed laser deposition
Thin Solid Films · 2003 · 459 citations
Fundamental understanding and modeling of reactive sputtering processes
Thin Solid Films · 2005 · 690 citations
Attempt to Design a Strong Solid
Physical review. B, Solid state · 1970 · 1,092 citations
Resonance Radiation and Excited Atoms
American Journal of Physics · 1972 · 1,322 citations
The M+1AX phases: Materials science and thin-film processing
Thin Solid Films · 2009 · 1,114 citations
A novel pulsed magnetron sputter technique utilizing very high target power densities
Surface and Coatings Technology · 1999 · 1,046 citations
A simple model for the formation of compressive stress in thin films by ion bombardment
Thin Solid Films · 1993 · 801 citations
Fundamental structure forming phenomena of polycrystalline films and the structure zone models
Thin Solid Films · 1998 · 721 citations
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