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A simple model for the formation of compressive stress in thin films by ion bombardment
Thin Solid Films · 1993 · Vol. 226(1) · pp. 30–34
C. A. Davis✉(University of Sydney)
Ion-surface interactions and analysisDiamond and Carbon-based Materials ResearchMetal and Thin Film MechanicsIonStress (linguistics)Flux (metallurgy)Thin filmModulusMaterials scienceChemistryAtomic physicsComposite materialPhysics
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