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Short cantilevers for atomic force microscopy

Review of Scientific Instruments · 1996 · Vol. 67(10) · pp. 3583–3590
D. A. WaltersJ. P. ClevelandNeil H. ThomsonP. K. HansmaMark A. WendmanG. GurleyVirgil B. Elings

Abstract

We have designed and tested a family of silicon nitride cantilevers ranging in length from 23 to 203 μm. For each, we measured the frequency spectrum of thermal motion in air and water. Spring constants derived from thermal motion data agreed fairly well with the added mass method; these and the resonant frequencies showed the expected increase with decreasing cantilever length. The effective cantilever density (calculated from the resonant frequencies) was 5.0 g/cm3, substantially affected by the mass of the reflective gold coating. In water, resonant frequencies were 2 to 5 times lower and damping was 9 to 24 times higher than in air. Thermal motion at the resonant frequency, a measure of noise in tapping mode atomic force microscopy, decreased about two orders of magnitude from the longest to the shortest cantilever. The advantages of the high resonant frequency and low noise of a short (30 μm) cantilever were demonstrated in tapping mode imaging of a protein sample in buffer. Low-noise images were taken with feedback at a rate of about 0.5 frames/s. Given proper setpoint adjustment, the sample was not damaged, despite this cantilever’s high spring constant of 1.3 N/m. Without feedback, images were taken at 1.5 frames/s.

Force Microscopy Techniques and ApplicationsMechanical and Optical ResonatorsIntegrated Circuits and Semiconductor Failure AnalysisCantileverNon-contact atomic force microscopyMaterials scienceSpring (device)Noise (video)Silicon nitrideOpticsAtomic force microscopySiliconPhysics
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Nanotechnology · 1995 · 1,571 citations
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