Comparison of calibration methods for atomic-force microscopy cantilevers

Abstract

The scientific community needs a rapid and reliable way of accurately determining the stiffness of atomic-force microscopy cantilevers. We have compared the experimentally determined values of stiffness for ten cantilever probes using four different methods. For rectangular silicon cantilever beams of well defined geometry, the approaches all yield values within 17% of the manufacturer's nominal stiffness. One of the methods is new, based on the acquisition and analysis of thermal distribution functions of the oscillator's amplitude fluctuations. We evaluate this method in comparison to the three others and recommend it for its ease of use and broad applicability.