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Atomic Force Microscope

Physical Review Letters · 1986 · Vol. 56(9) · pp. 930–933

G. Binnig✉(Stanford University)C. F. Quate(Stanford University)Ch. Gerber(Stanford University)

Abstract

The scanning tunneling microscope is proposed as a method to measure forces as small as ${10}^{\ensuremath{-}18}$ N. As one application for this concept, we introduce a new type of microscope capable of investigating surfaces of insulators on an atomic scale. The atomic force microscope is a combination of the principles of the scanning tunneling microscope and the stylus profilometer. It incorporates a probe that does not damage the surface. Our preliminary results in air demonstrate a lateral resolution of 30 \AA{}A and a vertical resolution less than 1 \AA{}.

Force Microscopy Techniques and Applications Mechanical and Optical Resonators Surface and Thin Film PhenomenaStylusMicroscopeProfilometerScanning tunneling microscopeScanning probe microscopyScanning Hall probe microscopeMaterials scienceMagnetic force microscopeAtomic force microscopyResolution (logic)

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