articleTop 1% cited
Applications of atomic layer deposition to nanofabrication and emerging nanodevices
Thin Solid Films · 2008 · Vol. 517(8) · pp. 2563–2580
Hyungjun Kim✉(Pohang University of Science and Technology)Han‐Bo‐Ram Lee(Pohang University of Science and Technology)W. J. Maeng(Pohang University of Science and Technology)
Semiconductor materials and devicesElectronic and Structural Properties of OxidesNanowire Synthesis and ApplicationsAtomic layer depositionNanotechnologyNanolithographyFabricationNanoscopic scaleNanometreMaterials scienceAtomic layer epitaxyThin filmDeposition (geology)
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Soft Lithography
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