reviewTop 1% cited
Soft Lithography
Angewandte Chemie International Edition · 1998 · Vol. 37(5) · pp. 550–575
Younan Xia✉(Harvard University)George M. Whitesides(Harvard University)
Abstract
Elastomeric stamps and molds provide a great opportunity to eliminate some of the disadvantages of photolithograpy, which is currently the leading technology for fabricating small structures. In the case of "soft lithography" there is no need for complex laboratory facilities and high-energy radiation. Therefore, this process is simple, inexpensive, and accessible even to molecular chemists. The current state of development in this promising area of research is presented here.
Nanofabrication and Lithography TechniquesAdvancements in Photolithography TechniquesMicrofluidic and Capillary Electrophoresis ApplicationsLithographyNanotechnologyElastomerMaterials scienceEngineeringComputer scienceOptoelectronics
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