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A graphical representation of the piezoresistance coefficients in silicon
IEEE Transactions on Electron Devices · 1982 · Vol. 29(1) · pp. 64–70
Yozo Kanda✉(Hamamatsu University School of Medicine)
Abstract
The longitudinal and transverse piezoresistance coefficients, Π(300 K), at room temperature are plotted as a function of the crystal directions for orientations in the
Advanced MEMS and NEMS TechnologiesMechanical and Optical ResonatorsAcoustic Wave Resonator TechnologiesRepresentation (politics)SiliconComputer scienceMaterials scienceTheoretical computer scienceOptoelectronics
Funding
- Shizuoka University
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891
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IEEE Sensors Journal · 2001 · 273 citations
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