article
Piezoresistance effect of silicon
Sensors and Actuators A Physical · 1991 · Vol. 28(2) · pp. 83–91
Yozo Kanda✉(Hamamatsu University School of Medicine)
Advanced MEMS and NEMS TechnologiesAcoustic Wave Resonator TechnologiesMechanical and Optical ResonatorsMaterials scienceImpuritySiliconCondensed matter physicsEffective mass (spring–mass system)ChemistryOptoelectronicsPhysicsClassical mechanics
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388
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1.50
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21
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81%
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References
A graphical representation of the piezoresistance coefficients in silicon
IEEE Transactions on Electron Devices · 1982 · 891 citations
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