Advanced MEMS and NEMS Technologies

This cluster of papers covers a wide range of topics related to Microelectromechanical Systems (MEMS), including silicon properties, microfabrication techniques, resonators, actuators, sensors, reliability issues, RF switches, nanomechanical testing, and thermal behavior.

Journals publishing in this area

1

Sensors and Actuators A Physical

ISSN 0924-42473,528 articles in this topic

203h-index

4.33Impact

18.2KArticles

504KCitations

2

IEEE Sensors Journal

IEEE Sensors Journal

ISSN 1530-437X1,474 articles in this topic

197h-index

3.30Impact

31.1KArticles

595.8KCitations

3

IEEE Transactions on Instrumentation and Measurement

ISSN 0018-9456679 articles in this topic

195h-index

3.74Impact

28.2KArticles

542.8KCitations

4

Proceedings of the IEEE

ISSN 0018-9219307 articles in this topic

466h-index

8.46Impact

20.1KArticles

1.3MCitations

5

International Journal of Electronics and Microcircuits

ISSN 2708-44932 articles in this topic

1h-index

0.11Impact

40Articles

4Citations