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Selective growth of wurtzite GaN and AlxGa1−xN on GaN/sapphire substrates by metalorganic vapor phase epitaxy

Journal of Crystal Growth · 1994 · Vol. 144(3-4) · pp. 133–140
Yoshiki KatoShota KitamuraKazumasa HiramatsuNobuhiko Sawaki
GaN-based semiconductor devices and materialsGa2O3 and related materialsZnO doping and propertiesWurtzite crystal structureEpitaxySapphireFacet (psychology)Vapor phaseMetalorganic vapour phase epitaxyOptoelectronicsMaterials scienceNitridePhase (matter)
Citations
316
FWCI
5.20
field-weighted impact
References
12
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97%
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