articleTop 1% cited
Structure and properties of TiN coatings
Thin Solid Films · 1985 · Vol. 128(1-2) · pp. 21–44
J.‐E. Sundgren✉(Thinfilm (Sweden))
Metal and Thin Film MechanicsCopper Interconnects and ReliabilitySemiconductor materials and devicesTinMicrostructureMaterials scienceThin filmSubstrate (aquarium)Phase (matter)Electrical resistivity and conductivityImpurityDeposition (geology)Grain size
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References
Diffusion barriers in thin films
Thin Solid Films · 1978 · 682 citations
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