articleTop 10% cited

Reactive-sputter-deposited TiN films on glass substrates

Thin Solid Films · 1991 · Vol. 197(1-2) · pp. 117–128

Joshua Pelleg✉(Ben-Gurion University of the Negev)Levy Zevin(Ben-Gurion University of the Negev)S. Lungo(Ben-Gurion University of the Negev)N. Croitoru(Tel Aviv University)

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Metal and Thin Film Mechanics GaN-based semiconductor devices and materials Copper Interconnects and ReliabilitySputteringMaterials scienceTinThin filmAnnealing (glass)DiffractionSubstrate (aquarium)Surface energyLattice (music)Lattice constant

Funding

National Center for Research and Development

Citations

737

FWCI

3.44

field-weighted impact

References

Percentile

92%

vs. same field & year

Citations per year

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References

Structure and properties of TiN coatings

Thin Solid Films · 1985 · 899 citations

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