articleTop 10% cited
Diffusion barriers in thin films
Thin Solid Films · 1978 · Vol. 52(3) · pp. 415–443
M.−A. Nicolet✉(California Institute of Technology)
Semiconductor materials and interfacesIntermetallics and Advanced Alloy PropertiesSurface and Thin Film PhenomenaDiffusion barrierMaterials scienceDiffusionTransition metalCarbideThin filmImpurityFabricationElectrical resistivity and conductivityMetal
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682
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4.71
field-weighted impact
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61
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96%
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Cited by
Structure and properties of TiN coatings
Thin Solid Films · 1985 · 899 citations
References
Thin Film Phenomena
Journal of The Electrochemical Society · 1970 · 2,011 citations
Constitution of Binary Alloys
Journal of The Electrochemical Society · 1958 · 14,796 citations
Volt-current characteristics for tunneling through insulating films
Journal of Physics and Chemistry of Solids · 1962 · 469 citations
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