articleTop 1% cited
A structure zone diagram including plasma-based deposition and ion etching
Thin Solid Films · 2009 · Vol. 518(15) · pp. 4087–4090
André Anders✉(Lawrence Berkeley National Laboratory)
Metal and Thin Film MechanicsPlasma Diagnostics and ApplicationsDiamond and Carbon-based Materials ResearchEtching (microfabrication)DiagramIonDeposition (geology)Sputter depositionKinetic energyHigh-power impulse magnetron sputteringPlasmaMaterials scienceSputtering
Funding
- U.S. Department of Energy
- Office of Energy Efficiency and Renewable Energy
Citations
884
FWCI
27.76
field-weighted impact
References
36
Percentile
100%
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Citations per year
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References
A novel pulsed magnetron sputter technique utilizing very high target power densities
Surface and Coatings Technology · 1999 · 1,046 citations
Fundamental structure forming phenomena of polycrystalline films and the structure zone models
Thin Solid Films · 1998 · 721 citations
Ionized physical vapor deposition (IPVD): A review of technology and applications
Thin Solid Films · 2006 · 1,045 citations
Computer simulation of ion-solid interactions
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1992 · 273 citations
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