Physical Sciences → Engineering → Electrical and Electronic Engineering
Plasma Diagnostics and Applications
This cluster of papers covers a wide range of topics related to plasma physics and its applications in the semiconductor industry, including plasma etching techniques, atomic layer etching, Hall thrusters for spacecraft propulsion, electron energy distribution function measurements, and ion-molecule collisions. It also explores the use of plasmas in electric propulsion for satellites and spacecraft.
981K works worldwide900.6K citations
Plasma EtchingSemiconductor IndustryAtomic Layer EtchingHall ThrustersElectric PropulsionLow Temperature PlasmasElectron Energy Distribution FunctionSpacecraft PropulsionIon-Molecule CollisionsLangmuir Probe
Journals publishing in this area
1
Bulletin of Miscellaneous Information (Royal Gardens Kew)
Bulletin of Miscellaneous Information (Royal Gardens Kew)
ISSN 0366-4457173,659 articles in this topic
247h-index
0.03Impact
7.2MArticles
541.2KCitations
3
526h-index
2.41Impact
152.6KArticles
4.9MCitations
4
200h-index
2.09Impact
28.5KArticles
629.3KCitations
5
271h-index
2.41Impact
35.7KArticles
948.7KCitations
6
249h-index
1.48Impact
57.3KArticles
991.7KCitations
7
125h-index
0.42Impact
276.5KArticles
654.9KCitations
8
236h-index
1.18Impact
88.5KArticles
1.2MCitations
9
223h-index
5.86Impact
31.6KArticles
992.6KCitations
10
212h-index
2.50Impact
33.4KArticles
770.3KCitations
12
1h-index
0.02Impact
63Articles
6Citations