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Biaxial alignment in sputter deposited thin films

Thin Solid Films · 2006 · Vol. 515(4) · pp. 1229–1249
Stijn MahieuPieter GhekiereDiederik DeplaRoger De Gryse
Magnetic properties of thin filmsMetal and Thin Film MechanicsOptical Coatings and GratingsMicrostructureMaterials scienceAmorphous solidSputter depositionSubstrate (aquarium)Thin filmDeposition (geology)SputteringCrystallitePlane (geometry)

Funding

  • Vlaamse regering
Citations
434
FWCI
10.37
field-weighted impact
References
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Cited by
Biaxial alignment in sputter deposited thin films
Thin Solid Films · 2006 · 434 citations
References
Elements of X-Ray Diffraction
American Journal of Physics · 1957 · 16,546 citations
<i>Fractal Concepts in Surface Growth</i>
Physics Today · 1995 · 3,305 citations
Control of reactive sputtering processes
Thin Solid Films · 2005 · 393 citations
Biaxial alignment in sputter deposited thin films
Thin Solid Films · 2006 · 434 citations
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