article Open AccessTop 10% cited
Capacitive sensors: When and how to use them
Sensors and Actuators A Physical · 1993 · Vol. 37-38 · pp. 93–105
Robert Puers✉(KU Leuven)
Advanced MEMS and NEMS TechnologiesElectrical and Thermal Properties of Materials3D IC and TSV technologiesCapacitive sensingCapacitorMiniaturizationElectrical engineeringPiezoresistive effectCapacitive power supplyElectrodePressure sensorSensitivity (control systems)Computer science
Citations
324
FWCI
4.30
field-weighted impact
References
66
Percentile
94%
vs. same field & year
Citations per year
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References
Anisotropic etching of silicon
IEEE Transactions on Electron Devices · 1978 · 793 citations
Silicon as a mechanical material
Proceedings of the IEEE · 1982 · 2,858 citations
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Capacitive sensors: When and how to use them
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