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Investigations on hydrophilic and hydrophobic silicon (100) wafer surfaces by X-ray photoelectron and high-resolution electron energy loss-spectroscopy

Applied Physics A · 1986 · Vol. 39(2) · pp. 73–82
M. GrundnerH.‐E. Jacob
Electron and X-Ray Spectroscopy TechniquesSemiconductor materials and devicesAdvanced Electron Microscopy Techniques and ApplicationsX-ray photoelectron spectroscopyWaferHigh resolution electron energy loss spectroscopyOxideMaterials scienceElectron energy loss spectroscopyChemical stateSiliconSpectroscopySurface energy
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Ideal hydrogen termination of the Si (111) surface
Applied Physics Letters · 1990 · 1,389 citations
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Investigations on hydrophilic and hydrophobic silicon (100) wafer surfaces by X-ray photoelectron and high-resolution electron energy loss-spectroscopy · Scinovex