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Ferroelectricity in Simple Binary ZrO<sub>2</sub> and HfO<sub>2</sub>

Nano Letters · 2012 · Vol. 12(8) · pp. 4318–4323
Johannes MüllerT. S. BösckeU. SchröderStefan MuellerD. BräuhausU. BöttgerL. FreyThomas Mikolajick

Abstract

The transition metal oxides ZrO(2) and HfO(2) as well as their solid solution are widely researched and, like most binary oxides, are expected to exhibit centrosymmetric crystal structure and therewith linear dielectric characteristics. For this reason, those oxides, even though successfully introduced into microelectronics, were never considered to be more than simple dielectrics possessing limited functionality. Here we report the discovery of a field-driven ferroelectric phase transition in pure, sub 10 nm ZrO(2) thin films and a composition- and temperature-dependent transition to a stable ferroelectric phase in the HfO(2)-ZrO(2) mixed oxide. These unusual findings are attributed to a size-driven tetragonal to orthorhombic phase transition that in thin films, similar to the anticipated tetragonal to monoclinic transition, is lowered to room temperature. A structural investigation revealed the orthorhombic phase to be of space group Pbc2(1), whose noncentrosymmetric nature is deemed responsible for the spontaneous polarization in this novel, nanoscale ferroelectrics.

Ferroelectric and Negative Capacitance DevicesSemiconductor materials and devicesFerroelectric and Piezoelectric MaterialsFerroelectricityOrthorhombic crystal systemTetragonal crystal systemMonoclinic crystal systemMaterials sciencePhase transitionDielectricMicroelectronicsCrystallographyOxide

Funding

  • European Regional Development Fund
Citations
1,684
FWCI
16.71
field-weighted impact
References
48
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References
Ferroelectricity in hafnium oxide thin films
Applied Physics Letters · 2011 · 2,609 citations
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