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Iron contamination in silicon technology

Applied Physics A · 2000 · Vol. 70(5) · pp. 489–534

A. A. Istratov✉(Lawrence Berkeley National Laboratory)H. Hieslmair(Lawrence Berkeley National Laboratory)E. R. Weber(University of California, Berkeley)

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Silicon and Solar Cell Technologies Electron and X-Ray Spectroscopy Techniques Semiconductor materials and devicesSiliconNeutron activation analysisWaferNeutron activationMaterials scienceX-ray photoelectron spectroscopyAnalytical Chemistry (journal)Mass spectrometryContaminationRadiochemistry

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334

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13.27

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99%

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References

The Oxidation States of the Elements and Their Potentials in Aqueous Solutions

Soil Science · 1939 · 1,152 citations

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