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Sputtering studies with the Monte Carlo Program TRIM.SP
Applied Physics A · 1984 · Vol. 34(2) · pp. 73–94
J.P. Biersack✉(Max Planck Institute for Plasma Physics)W. Eckstein(Max Planck Institute for Plasma Physics)
Ion-surface interactions and analysisFusion materials and technologiesMetal and Thin Film MechanicsSputteringTrimMonte Carlo methodAtomic physicsIonYield (engineering)Energy (signal processing)Materials sciencePhysicsThin film
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References
Calculations of nuclear stopping, ranges, and straggling in the low-energy region
Physical review. B, Solid state · 1977 · 806 citations
Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline Targets
Physical Review · 1969 · 3,499 citations
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