articleTop 1% cited
Computer simulations of sputtering
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1987 · Vol. 27(1) · pp. 21–36
J.P. Biersack✉(Fraunhofer Institute for Telecommunications, Heinrich Hertz Institute)
Ion-surface interactions and analysisDiamond and Carbon-based Materials ResearchFusion materials and technologiesMonte Carlo methodRecoilSputteringTrimSublimation (psychology)PhysicsIonAtomic physicsStatistical physicsComputational physics
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259
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References
Tridyn — A TRIM simulation code including dynamic composition changes
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1984 · 638 citations
Calculations of nuclear stopping, ranges, and straggling in the low-energy region
Physical review. B, Solid state · 1977 · 806 citations
Comparison of theoretical and empirical interatomic potentials
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1986 · 301 citations
Computer simulation of atomic-displacement cascades in solids in the binary-collision approximation
Physical review. B, Solid state · 1974 · 1,585 citations
Sputtering studies with the Monte Carlo Program TRIM.SP
Applied Physics A · 1984 · 911 citations
Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline Targets
Physical Review · 1969 · 3,499 citations
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