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Toughness measurement of thin films: a critical review

Surface and Coatings Technology · 2004 · Vol. 198(1-3) · pp. 74–84
Sam ZhangDeen SunYongqing FuHejun Du
Metal and Thin Film MechanicsAdvanced ceramic materials synthesisSemiconductor materials and devicesMaterials scienceIndentationThin filmScratchToughnessComposite materialBendingTensile testingSubstrate (aquarium)Plasticity
Citations
402
FWCI
14.29
field-weighted impact
References
84
Percentile
99%
vs. same field & year
Citations per year
References
Cracking of thin bonded films in residual tension
International Journal of Solids and Structures · 1992 · 634 citations
Measurement of hardness and elastic modulus by instrumented indentation: Advances in understanding and refinements to methodology
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Measurement of mechanical properties by ultra-low load indentation
Materials Science and Engineering A · 1998 · 1,067 citations
An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments
Journal of materials research/Pratt's guide to venture capital sources · 1992 · 26,236 citations
Elastic/Plastic Indentation Damage in Ceramics: The Median/Radial Crack System
Journal of the American Ceramic Society · 1980 · 2,071 citations
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Toughness measurement of thin films: a critical review · Scinovex