articleTop 10% cited
Anisotropic etching of silicon in TMAH solutions
Sensors and Actuators A Physical · 1992 · Vol. 34(1) · pp. 51–57
Osamu Tabata✉(Toyota Central Research and Development Laboratories (Japan))Ryouji Asahi(Toyota Central Research and Development Laboratories (Japan))Hirofumi Funabashi(Toyota Central Research and Development Laboratories (Japan))Keiichi Shimaoka(Toyota Central Research and Development Laboratories (Japan))Susumu Sugiyama(Toyota Central Research and Development Laboratories (Japan))
Semiconductor materials and devicesSilicon Nanostructures and PhotoluminescenceAdvanced Surface Polishing TechniquesHillockAmmonium hydroxideSiliconDissolutionEtching (microfabrication)Materials scienceEtch pit densityCrystal (programming language)AnisotropyWafer
Citations
454
FWCI
3.16
field-weighted impact
References
16
Percentile
91%
vs. same field & year
Citations per year
References
Anisotropic Etching of Crystalline Silicon in Alkaline Solutions: I . Orientation Dependence and Behavior of Passivation Layers
Journal of The Electrochemical Society · 1990 · 1,599 citations
Citation Network
How this paper connects to the literature. Drag to explore, click any node to open that paper.