articleTop 1% cited
Sputtering—a review of some recent experimental and theoretical aspects
Applied Physics A · 1975 · Vol. 8(3) · pp. 185–198
H. Oechsner✉(Clausthal University of Technology)
Ion-surface interactions and analysisNuclear Physics and ApplicationsMetal and Thin Film MechanicsSputteringProjectileAtomic physicsCollision cascadeIonMaterials scienceAnisotropyCollisionPhysicsThin film
Citations
297
FWCI
15.12
field-weighted impact
References
132
Percentile
99%
vs. same field & year
Citations per year
References
Surface investigation of solids by the statical method of secondary ion mass spectroscopy (SIMS)
Surface Science · 1973 · 445 citations
Handbook of Thin Film Technology
Journal of The Electrochemical Society · 1971 · 2,765 citations
Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline Targets
Physical Review · 1969 · 3,499 citations
Citation Network
How this paper connects to the literature. Drag to explore, click any node to open that paper.