articleTop 1% cited
Growth, structure, and microhardness of epitaxial TiN/NbN superlattices
Journal of materials research/Pratt's guide to venture capital sources · 1992 · Vol. 7(4) · pp. 901–911
M. Shinn✉(Northwestern University)Lars Hultman(Northwestern University)Scott A. Barnett(Northwestern University)
Metal and Thin Film MechanicsGaN-based semiconductor devices and materialsDiamond and Carbon-based Materials ResearchSuperlatticeMaterials scienceTinEpitaxyTransmission electron microscopyHigh-resolution transmission electron microscopyIndentation hardnessSputter depositionDiffractionThin film
Funding
- National Science Foundation
Citations
367
FWCI
18.76
field-weighted impact
References
26
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100%
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References
Attempt to Design a Strong Solid
Physical review. B, Solid state · 1970 · 1,092 citations
Defects in epitaxial multilayers I. Misfit dislocations
Journal of Crystal Growth · 1974 · 3,086 citations
Reactive-sputter-deposited TiN films on glass substrates
Thin Solid Films · 1991 · 737 citations
Mechanical metallurgy
Journal of the Franklin Institute · 1962 · 4,398 citations
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