articleTop 1% cited
Application of hydrogen ion beams to Silicon On Insulator material technology
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1996 · Vol. 108(3) · pp. 313–319
M. Bruel✉(Commissariat à l'Énergie Atomique et aux Énergies Alternatives)
Silicon and Solar Cell TechnologiesIntegrated Circuits and Semiconductor Failure AnalysisIon-surface interactions and analysisSilicon on insulatorMaterials scienceWaferSlicingSiliconWafer bondingOptoelectronicsProtonIonInsulator (electricity)
Citations
312
FWCI
24.09
field-weighted impact
References
8
Percentile
100%
vs. same field & year
Citations per year
References
Silicon on insulator material technology
Electronics Letters · 1995 · 999 citations
Citation Network
How this paper connects to the literature. Drag to explore, click any node to open that paper.