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Soft lithography for micro- and nanoscale patterning

Nature Protocols · 2010 · Vol. 5(3) · pp. 491–502
Dong QinYounan XiaGeorge M. Whitesides
Nanofabrication and Lithography TechniquesAdvancements in Photolithography TechniquesMicrofluidic and Capillary Electrophoresis ApplicationsNanotechnologyLithographyNanoscopic scaleMaterials scienceComputational biologyBiologyOptoelectronics

MeSH terms

BiotechnologyPhotographyPolymersCoated Materials, BiocompatibleElastomersNanotechnologyMicrofluidic Analytical TechniquesNanostructures
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