articleTop 10% cited
Equivalent-circuit model of the squeezed gas film in a silicon accelerometer
Sensors and Actuators A Physical · 1995 · Vol. 48(3) · pp. 239–248
Timo Veijola✉(Helsinki Institute of Physics)Heikki Kuisma(Vaisala (Finland))Juha Lahdenperä(Vaisala (Finland))Tapani Ryhänen(Vaisala (Finland))
Advanced MEMS and NEMS TechnologiesMechanical and Optical ResonatorsAcoustic Wave Resonator TechnologiesAccelerometerResistorCapacitive sensingEquivalent circuitFrequency responsePlanarMaterials scienceMechanicsViscosityVoltage
Citations
461
FWCI
6.87
field-weighted impact
References
13
Percentile
97%
vs. same field & year
Citations per year
Cited by
Squeeze film air damping in MEMS
Sensors and Actuators A Physical · 2007 · 681 citations
Citation Network
How this paper connects to the literature. Drag to explore, click any node to open that paper.