articleTop 1% cited
Squeeze film air damping in MEMS
Sensors and Actuators A Physical · 2007 · Vol. 136(1) · pp. 3–27
Minhang Bao✉(Fudan University)Heng Yang(State Key Laboratory of Transducer Technology)
Advanced MEMS and NEMS TechnologiesAdvanced Sensor Technologies ResearchMechanical and Optical ResonatorsMicroelectromechanical systemsMechanicsNonlinear systemReynolds equationMaterials scienceMagnetic dampingIsothermal processTorsion (gastropod)Damping torqueMechanical engineering
Citations
681
FWCI
30.35
field-weighted impact
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70
Percentile
100%
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Citations per year
References
Mechanical-thermal noise in micromachined acoustic and vibration sensors
IEEE Transactions on Electron Devices · 1993 · 733 citations
Equivalent-circuit model of the squeezed gas film in a silicon accelerometer
Sensors and Actuators A Physical · 1995 · 461 citations
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