articleTop 10% cited
Glow discharge processes; Sputtering and plasma etching
IEEE Journal of Quantum Electronics · 1981 · Vol. 17(5) · pp. 817–817
Metal and Thin Film MechanicsPlasma Diagnostics and ApplicationsSemiconductor materials and devicesSputteringMaterials sciencePlasmaEtching (microfabrication)Glow dischargePlasma etchingOptoelectronicsReactive-ion etchingAtomic physicsThin film
Citations
489
FWCI
4.23
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0
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93%
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