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Machining of sub-micron holes using a femtosecond laser at 800 nm

Optics Communications · 1995 · Vol. 114(1-2) · pp. 106–110
P. P. PronkoS. K. DuttaJeffrey A. SquierJ. V. RuddD. DuG. Mourou
Laser Material Processing TechniquesLaser-induced spectroscopy and plasmaAdvanced Surface Polishing TechniquesMaterials scienceFemtosecondSapphireLaserOpticsMachiningLaser ablationAblationTi:sapphire laserThermal
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