articleTop 10% cited
Silicon carbide as a new MEMS technology
Sensors and Actuators A Physical · 2000 · Vol. 82(1-3) · pp. 210–218
P.M. Sarro✉(Delft University of Technology)
Silicon Carbide Semiconductor TechnologiesDiamond and Carbon-based Materials ResearchPlasma Diagnostics and ApplicationsMicroelectromechanical systemsSilicon carbideMaterials scienceMicrosystemSurface micromachiningCarbideThermal conductivityMicrostructureLayer (electronics)Nanotechnology
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