review Open AccessTop 10% cited
A review of silicon microphones
Sensors and Actuators A Physical · 1994 · Vol. 44(1) · pp. 1–11
P.R. Scheeper✉A.G.H. van der Donk(Texas Instruments (United States))Wouter Olthuis(University of Twente)P. Bergveld(University of Twente)
Advanced MEMS and NEMS TechnologiesMechanical and Optical Resonators3D IC and TSV technologiesMicrophonePreamplifierPiezoresistive effectMaterials scienceNoise (video)CapacitanceCapacitive sensingAcousticsSurface micromachiningSilicon
Citations
342
FWCI
6.34
field-weighted impact
References
46
Percentile
97%
vs. same field & year
Citations per year
References
Silicon as a mechanical material
Proceedings of the IEEE · 1982 · 2,858 citations
The resonant gate transistor
IEEE Transactions on Electron Devices · 1967 · 1,073 citations
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