articleTop 10% cited
Parasitic charging of dielectric surfaces in capacitive microelectromechanical systems (MEMS)
Sensors and Actuators A Physical · 1998 · Vol. 71(1-2) · pp. 74–80
Jürgen Wibbeler✉(Chemnitz University of Technology)Günter Pfeifer(Chemnitz University of Technology)Michael Hietschold(Chemnitz University of Technology)
Advanced MEMS and NEMS TechnologiesMechanical and Optical ResonatorsForce Microscopy Techniques and ApplicationsPassivationMaterials scienceSilicon nitrideMicroelectromechanical systemsOptoelectronicsSiliconDielectricCapacitive sensingSilicon oxideElectrical engineering
Funding
- Technische Universität Chemnitz
- Technische Universität Dresden
Citations
297
FWCI
5.30
field-weighted impact
References
19
Percentile
95%
vs. same field & year
Citations per year
Cited by
Electrostatic pull-in instability in MEMS/NEMS: A review
Sensors and Actuators A Physical · 2014 · 567 citations
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