reviewTop 1% cited

Electrostatic pull-in instability in MEMS/NEMS: A review

Sensors and Actuators A Physical · 2014 · Vol. 214 · pp. 187–218

Wenming Zhang✉(Shanghai Jiao Tong University)Han Yan(Shanghai Jiao Tong University)Zhike Peng(Shanghai Jiao Tong University)Guang Meng(Shanghai Jiao Tong University)

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Advanced MEMS and NEMS Technologies Mechanical and Optical Resonators Acoustic Wave Resonator TechnologiesNanoelectromechanical systemsMicroelectromechanical systemsInstabilityNanotechnologyNonlinear systemComputer scienceMaterials sciencePhysicsMechanics

Citations

567

FWCI

31.07

field-weighted impact

References

293

Percentile

100%

vs. same field & year

Citations per year

References

Parasitic charging of dielectric surfaces in capacitive microelectromechanical systems (MEMS)

Sensors and Actuators A Physical · 1998 · 297 citations

The resonant gate transistor

IEEE Transactions on Electron Devices · 1967 · 1,073 citations

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