Stable glow plasma at atmospheric pressure

Abstract

A stable glow plasma at atmospheric pressure has been achieved for plasma treatment under selected conditions, for example the structure of electrodes, the kind of dilute gas, and the frequency of power. The surface fluorination of PET film and carbon thin-film deposition by such a plasma is described here. The surface energy can be controlled by plasma treatment of various concentrations (O2/CF4/He) in the same way as the lower pressure method that has been reported by Kogoma and co-workers (1987). Active species in plasma are identified by emission spectroscopy.