articleTop 1% cited
Ion beam modification of insulators
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1988 · Vol. 34(1) · pp. 137–138
Metal and Thin Film MechanicsIon-surface interactions and analysisElectron and X-Ray Spectroscopy TechniquesIon beamIonMaterials scienceBeam (structure)Engineering physicsOpticsPhysics
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