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Design and applications of MEMS flow sensors: A review

Sensors and Actuators A Physical · 2019 · Vol. 295 · pp. 483–502
Fatemeh EjeianShohreh AzadiAmir RazmjouYasin OroojiAjay Giri Prakash KottapalliMajid Ebrahimi WarkianiMohsen Asadnia
Gas Sensing Nanomaterials and SensorsAdvanced MEMS and NEMS TechnologiesAnalytical Chemistry and SensorsMicroelectromechanical systemsPiezoresistive effectComputer scienceFlow (mathematics)Mechanical engineeringSystems engineeringControl engineeringEngineeringMaterials scienceNanotechnology

Funding

  • Australian Research Council
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