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Fourier transform profilometry for the automatic measurement of 3-D object shapes

Applied Optics · 1983 · Vol. 22(24) · pp. 3977–3977
Mitsuo TakedaKazuhiro Mutoh

Abstract

A new computer-based technique for automatic 3-D shape measurement is proposed and verified by experiments. In contrast to the moire contouring technique, a grating pattern projected onto the object surface is Fourier-transformed and processed in its spatial frequency domain as well as in its space-signal domain. This technique has a much higher sensitivity than the conventional moire technique and is capable of fully automatic distinction between a depression and an elevation on the object surface. There is no requirement for assigning fringe orders and interpolating data in the regions between contour fringes. The technique is free from errors caused by spurious moire fringes generated by the higher harmonic components of the grating pattern.

Optical measurement and interference techniquesAdvanced Measurement and Metrology TechniquesAdvanced Measurement and Detection MethodsOpticsProfilometerFourier transformSpatial frequencyObject (grammar)PtychographyComputer scienceMaterials scienceArtificial intelligencePhysics
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