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Automated phase-measuring profilometry using defocused projection of a Ronchi grating

Optics Communications · 1992 · Vol. 94(6) · pp. 561–573
Xianyu SuWensen ZhouGert von BallyDalibor Vukičević
Optical measurement and interference techniquesAdvanced Measurement and Detection MethodsSurface Roughness and Optical MeasurementsGratingProfilometerOpticsPhase (matter)Computer scienceProjection (relational algebra)Computer visionPhysicsAlgorithm

Funding

  • Centre International de Recherche sur le Cancer
  • National Natural Science Foundation of China
  • Sichuan University
Citations
275
FWCI
4.37
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