articleTop 10% cited
Electrostatic-comb drive of lateral polysilicon resonators
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Advanced MEMS and NEMS TechnologiesMechanical and Optical ResonatorsPhotonic and Optical DevicesResonatorMaterials scienceCapacitive sensingOptoelectronicsComb driveCapacitorSubstrate (aquarium)Chemical vapor depositionDopingVoltage
Citations
452
FWCI
9.85
field-weighted impact
References
8
Percentile
99%
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Nanoelectromechanical systems
Review of Scientific Instruments · 2005 · 1,326 citations
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