articleTop 10% cited
An analytical model for support loss in micromachined beam resonators with in-plane flexural vibrations
Sensors and Actuators A Physical · 2003 · Vol. 109(1-2) · pp. 156–164
Zhili Hao✉(Georgia Institute of Technology)A. Erbil(State Street (United States))Farrokh Ayazi(Georgia Institute of Technology)
Advanced MEMS and NEMS TechnologiesMechanical and Optical ResonatorsAcoustic Wave Resonator TechnologiesResonatorBeam (structure)VibrationFlexural strengthMaterials scienceWavelengthOpticsTransverse planeAcousticsPhysics
Funding
- Defense Advanced Research Projects Agency
Citations
379
FWCI
8.83
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References
22
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